Electromechanics and MEMS
Cambridge University Press, 5/2/2013
EAN 9780521764834, ISBN10: 0521764831
Hardcover, 577 pages, 24.7 x 17.4 x 3 cm
Language: English
Offering a consistent, systematic approach to capacitive, piezoelectric and magnetic MEMS, from basic electromechanical transducers to high-level models for sensors and actuators, this comprehensive textbook equips graduate and senior-level undergraduate students with all the resources necessary to design and develop practical, system-level MEMS models. The concise yet thorough treatment of the underlying principles of electromechanical transduction provides a solid theoretical framework for this development, with each new topic related back to the core concepts. Repeated references to the shared commonalities of all MEMS encourage students to develop a systems-based design perspective. Extensive use is made of easy-to-interpret electrical and mechanical analogs, such as electrical circuits, electromechanical two-port models and the cascade paradigm. Each chapter features worked examples and numerous problems, all designed to test and extend students' understanding of the key principles.
1. Introduction
2. Circuit-based modeling
3. Capacitive lumped parameter electromechanics
4. Small-signal capacitive electromechanical systems
5. Capacitive sensing and resonant drive circuits
6. Distributed 1-D and 2-D electromechanical structures
7. Practical MEMS devices
8. Electromechanics of piezoelectric elements
9. Electromechanics of magnetic MEMS devices
A. Review of quasistatic electromagnetics
B. Review of mechanical resonators
C. Micromachining
D. A brief review of solid mechanics.
Advance praise: 'This is an excellent textbook presenting the fundamentals of electromechanics required by every practising MEMS engineer. The authors treat the arduous concepts of coupled electrical and mechanical systems simultaneously with lucidity and a thorough pedagogical rigor that comes from deep appreciation of the field and the love to impart that knowledge as a teacher. The book elucidates the concepts with very topical examples of microelectromechanical systems such as MEMS microphones, comb drive actuators, gyroscopes, energy harvesters, and piezoelectric and magnetic devices including Matlab® models and [a] comprehensive set of problems at the end of each chapter.' Srinivas Tadigadapa, Pennsylvania State University