Focused Ion Beam Systems
Cambridge University Press, 9/13/2007
EAN 9780521831994, ISBN10: 0521831997
Hardcover, 408 pages, 24.8 x 17.6 x 2.4 cm
Language: English
The focused ion beam (FIB) system is an important tool for understanding and manipulating the structure of materials at the nanoscale. Combining this system with an electron beam creates a DualBeam - a single system that can function as an imaging, analytical and sample modification tool. Presenting the principles, capabilities, challenges and applications of the FIB technique, this edited volume, first published in 2007, comprehensively covers the ion beam technology including the DualBeam. The basic principles of ion beam and two-beam systems, their interaction with materials, etching and deposition are all covered, as well as in situ materials characterization, sample preparation, three-dimensional reconstruction and applications in biomaterials and nanotechnology. With nanostructured materials becoming increasingly important in micromechanical, electronic and magnetic devices, this self-contained review of the range of ion beam methods, their advantages, and when best to implement them is a valuable resource for researchers in materials science, electrical engineering and nanotechnology.
List of contributors
Preface
1. Introduction to the focused ion beam system Nan Yao
2. Interaction of ions with matter Nobutsugu Imanishi
3. Gas assisted ion beam etching and deposition Hyoung Ho (Chris) Kang, Clive Chandler and Matthew Weschler
4. Imagining using electrons and ion beams Kaoru Ohya and Tohru Ishitani
5. Characterization methods using FIB/SEM DualBeam instrumentation Steve Rentjens and Lucille A. Giannuzzi
6. High-density FIB-SEM 3D nanotomography
with applications of real-time imaging during FIB milling E. L. Principe
7. Fabrication of nanoscale structures using ion beams Ampere A. Tseng
8. Preparation for physico-chemical analysis Richard Langford
9. In-situ sample manipulation and imaging T. Kamino, T. Yaguchi, T. Ohnishi and T. Ishitani
10. Micro-machining and mask repair Mark Utlaut
11. Three-dimensional visualization of nanostructured materials using focused ion beam tomography Derren Dunn, Alan J. Kubis and Robert Hull
12. Ion beam implantation of surface layers Daniel Recht and Nan Yao
13. Applications for biological materials Kirk Hou and Nan Yao
14. Focused ion beam systems as a multifunctional tool for nanotechnology Toshiaki Fujii, Tatsuya Asahata and Takashi Kaito
Index.