Sub-Half-Micron Lithography ULSIs

Sub-Half-Micron Lithography ULSIs

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Katsumi Suzuki
Cambridge University Press
Edition: New Ed, 2008-08-21
EAN 9780521022347, ISBN10: 0521022347

Paperback, 344 pages, 24.6 x 18.9 x 1.8 cm